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Model analysis of plasma-surface interactions during silicon oxide etching in fluorocarbon plasmas
Model analysis of plasma-surface interactions during silicon oxide etching in fluorocarbon plasmas
Paper
博士論文
Hiroshi Fukumoto [著]
[Hiroshi Fukumoto]
[2012]
<UT51-2012-E707>
National Diet Library
Author Heading
福本, 浩志
フルオロカーボンプラズマによる酸化シリコンエッチングにおけるプラズマ－表面相互作用の数値解析
フルオロカーボンプラズマによる酸化シリコンエッチングにおけるプラズマ－表面相互作用の数値解析
Digital
博士論文
Fukumoto, Hiroshi
京都大学 (Kyoto University)
2012-05-23
Available online
Other Libraries in Japan
Author Alias
福本, 浩志
フクモト, ヒロシ
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