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Adhesion of polysilicon microbeams in controlled humidity ambients SAND981034C DE98 005456

Adhesion of polysilicon microbeams in controlled humidity ambients SAND981034C DE98 005456
Microform規格・テクニカルリポート類
Boer, M. P, Clews, P. J, Smith, B. K, Michalske, T. A1998<LS-DE98/005456>
National Diet Library

Thin teflon-like films for MEMS: Film properties and reliability studies SAND980109C DE98 003931 CONF980918

Thin teflon-like films for MEMS: Film properties and reliability studies SAND980109C DE98 003931 CONF980918
Microform規格・テクニカルリポート類
Smith, B. K, LaVigne, G, Sniegowski, J. J, Brown, C. D1998<LS-DE98/003931>
National Diet Library

Thin teflon-like films for eliminating adhesion in released polysilicon microstructures SAND-96-2888C DE97 004623 CONF-9606464

Thin teflon-like films for eliminating adhesion in released polysilicon microstructures SAND-96-2888C DE97 004623 CONF-9606464
Microform規格・テクニカルリポート類
Smith, B. K, Sniegowski, J. J, LaVigne, G1996<LS-DE97/004623>
National Diet Library

"Byron Station Operability Assessment for GL 95-07 Valves."

"Byron Station Operability Assessment for GL 95-07 Valves."
Paper図書
SMITH, B. K.COMMONWEALTH EDISON CO.1996/07/05.
Other Libraries in Japan

MICROMACHINED SENSOR AND ACTUATOR RESEARCH AT THE MICROELECTRONICS DEVELOPMENT LABORATORY (SAND ; SAND-94-2193C)

MICROMACHINED SENSOR AND ACTUATOR RESEARCH AT THE MICROELECTRONICS DEVELOPMENT LABORATORY (SAND ; SAND-94-2193C)
Paper図書
SMITH, J.H.// BARRON, C.C.// FLEMING, J.G.// MONTAGUE, S.// RODRIGUEZ, J.L.// SMITH, B.K.// SNIEGOWSKI, J.J. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingSMITH, J.H. BARRON, C.C. FLEMING, J.G. MONTAGUE, S. RODRIGUEZ, J.L. SMITH, B.K. SNIEGOWSKI, J.J.

MICROMACHINED SENSORS AND ACTUATORS (SAND ; SAND-91-0327C)

MICROMACHINED SENSORS AND ACTUATORS (SAND ; SAND-91-0327C)
Paper図書
SMITH, B.K. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (USA))Sandia National Laboratories(Sandia National Laboratories)1991.
Other Libraries in Japan
  • Author HeadingSMITH, B.K.

PLASMA-ETCHING SCIENCE MEETS TECHNOLOGY IN THE MDL (SAND ; SAND-93-0187)

PLASMA-ETCHING SCIENCE MEETS TECHNOLOGY IN THE MDL (SAND ; SAND-93-0187)
Paper図書
GREENBERG, K.E.// MILLER, P.A.// PATTESON, R.// SMITH, B.K. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1993.
Other Libraries in Japan
  • Author HeadingGREENBERG, K.E. MILLER, P.A. PATTESON, R. SMITH, B.K.

MICROMACHINED ACTUATOR AND SENSOR CAPABILITIES AT THE MICROELECTRONICS DEVELOPMENT LABORATORY. (SAND ; SAND-93-0816C)

MICROMACHINED ACTUATOR AND SENSOR CAPABILITIES AT THE MICROELECTRONICS DEVELOPMENT LABORATORY. (SAND ; SAND-93-0816C)
Paper図書
SNIEGOWSKI, J.J.// BLAIN, M.G.// FLEMING, J.G.// GARCIA, E.J.// KOEHLER, D.R.// SMITH, B.K.// SMITH, J.H. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1993.
Other Libraries in Japan
  • Author HeadingSNIEGOWSKI, J.J. BLAIN, M.G. FLEMING, J.G. GARCIA, E.J. KOEHLER, D.R. SMITH, B.K. SMITH, J.H.

MICRO-MACHINED RESONATOR (PATENTS-US ; PATENTS-US-A7803815)

MICRO-MACHINED RESONATOR (PATENTS-US ; PATENTS-US-A7803815)
Paper図書
GODSHALL, N.A.// KOEHLER, D.R.// LIANG, A.Y.// SMITH, B.K. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))1991.
Other Libraries in Japan
  • Author HeadingGODSHALL, N.A. KOEHLER, D.R. LIANG, A.Y. SMITH, B.K.

INTERFACIAL FORCE SENSOR WITH FORCE-FEEDBACK CONTROL (SAND ; SAND-90-2558C)

INTERFACIAL FORCE SENSOR WITH FORCE-FEEDBACK CONTROL (SAND ; SAND-90-2558C)
Paper図書
JOYCE, S.A.// HOUSTON, J.E.// SMITH, B.K. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (USA))Sandia National Laboratories(Sandia National Laboratories)1990.
Other Libraries in Japan
  • Author HeadingJOYCE, S.A. HOUSTON, J.E. SMITH, B.K.

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