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(Ti,Al)NのCVD成膜における移動現象と
膜組成
制御
(Ti,Al)NのCVD成膜における移動現象と膜組成制御
Paper
図書
菊池, 淳, 東北大学
1996-1998
<Y151-H08455343>
National Diet Library
Subject Heading
窒化チタン 窒化アルミニウム 複合膜 化学気相析出
膜組成
成膜連度 化学物相
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