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ナノ・メータ領域における原子追尾方式による
軸の回転精度
測定システムに関する研究
ナノ・メータ領域における原子追尾方式による軸の回転精度測定システムに関する研究
Paper
図書
奥山, 栄樹, 秋田大学
1999-2000
<Y151-H11650114>
National Diet Library
Subject Heading
軸の回転精度
STM ナノ・メータ
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