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超高キャリア濃度半導体構造を用いた超低抵抗金属/半導体接合の形成
超高キャリア濃度半導体構造を用いた超低抵抗金属/半導体接合の形成
Paper
図書
室田淳一, 東北大学 [著]
[室田淳一]
2001-2003
<Y151-H13355013>
National Diet Library
Subject Heading
IV族半導体 / 不純物ドーピング / 原子層 /
金属/半導体接触
抵抗 / CVD / SiGeC / P / B
金属-半導体接触
界面における電子物性
金属-半導体接触界面における電子物性
Paper
図書
遠山, 尚武, 九州工業大学
1986-1987
<Y151-S61550231>
National Diet Library
Subject Heading
金属-半導体接触
シヨツトキーダイオード 接触界面 シリサイド
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