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再構成表面および金属吸着表面の内部応力の透過電子顕微鏡法による研究
再構成表面および金属吸着表面の内部応力の透過電子顕微鏡法による研究
Paper
図書
八木, 克道, 東京工業大学
1994-1995
<Y151-H05452037>
National Diet Library
Subject Heading
表面歪 表面内部応力
Si (001) 2 1
透過電顕法 反対電顕法
STM/STSによるシリコンウエーハ表面の金属汚染物の極微量元素分析
STM/STSによるシリコンウエーハ表面の金属汚染物の極微量元素分析
Paper
図書
遠藤, 勝義, 大阪大学
1994-1996
<Y151-H06452160>
National Diet Library
Subject Heading
STM/STS Ab-initio分子軌道法 水素終端化Si表面 第一原理分子動力学 局所状態密度
Si (001) 2 1
表面 元素分析 Siウエーハ
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