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ポリアミツク酸と
SiOガス
を出発原料とする超肉薄SiCの創製と形状・特性制御
ポリアミツク酸とSiOガスを出発原料とする超肉薄SiCの創製と形状・特性制御
Paper
図書
内山, 休男, 長崎大学
2000-2002
<Y151-H12650672>
National Diet Library
Subject Heading
ポリアミツク酸
SiOガス
シリコンカ-バイド 気相合成 形状制御 特性制御
シリコン結晶成長系における高温熱化学反応と熱・物質移動現象
シリコン結晶成長系における高温熱化学反応と熱・物質移動現象
Paper
図書
干川, 圭吾, 信州大学
1999-2000
<Y151-H11450009>
National Diet Library
Subject Heading
CZ-Si結晶 高温熱化学反応 熱・物質移動現象 石英るつぼ Si融液
SiOガス
成長界面 無転位結晶
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