Jump to main content
NDL SEARCH (NATIONAL DIET LIBRARY, JAPAN)
Open Menu
Search
Refiners
Refiners
Library
Close field
National Diet Library
Other Libraries in Japan
Available online
Title
Close field
Author/Editor
Close field
Publisher
Close field
Year
Close field
yr
〜
yr
Open
2000s
(2)
2020s
(1)
ISBN / ISSN
Close field
Call number
Close field
Material type
Link to Help Page
Close field
Books
Periodicals
（2）
Newspapers
Japanese and Chinese Old Materials
Doctoral Dissertations
Maps
Musical Scores
Web sites
Online Publications
Electronic Resources
Video Materials
Audio Materials
Standards and Technical Reports
（1）
Manuscripts and Images
Deselect all
Periodical article etc
Material Format
Link to Help Page
Close field
Digital
Paper
（3）
Microform
Recording Media
Deselect all
Refiners
Refiners
Search results 3
20 results per page
50 results per page
100 results per page
List
Thumbnails
Table
Relevance
Published (old first)
Published (new first)
Title (ascend)
Title (descend)
Author (ascend)
Author (descend)
Call number
Group by title
Add all to My List
Development of Bipolar Electrostatic Chuck with a Beam-Array Assembly Fabricated by Lithography
Development of Bipolar Electrostatic Chuck with a Beam-Array Assembly Fabricated by Lithography
Paper
規格・テクニカルリポート類
田岡, 祐樹, Taoka, Yuki, 河鰭, 康平, Kawabata, Kohei,
HEMTHAVY, PASOMPHONE
, 崔, 勝萬, CHOI, SEUNGMAN, 高橋, 邦夫, TAKAHASHI, KUNIO, 齋藤, 滋規, SAITO, Shigeki
2022-07
International Journal of Automation Technology
16 No. 4
p.471-477
Other Libraries in Japan
Author Heading
...awabata, Kohei
HEMTHAVY, PASOMPHONE
崔, 勝萬 CHOI, SEUNGMAN 高橋, 邦夫 T...
日本機械学会誌
日本機械学会誌
Paper
雑誌
雑誌タイトル
日本機械学会
1938-
<Z16-110>
National Diet Library
Other Libraries in Japan
Volumes of this title
Reached to the end of result.
Bulk download of bibliographic information
RSS
RSS