John L. Sturtevant, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering, AZ Electronic Materials (USA), Rohm and Haas Electronic Materials (USA) ; cooperating organization, International SEMATECH ; published by SPIE--the International Society for Optical Engineering.SPIEc2005
全国の図書館
著者標目Advances in resist technology and processing Sturtevant, John L. Society o...
Régine G. Tarascon-Auriol chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECHSPIEc1997
全国の図書館
著者標目Advances in resist technology and processing Tarascon-Auriol, R. G. Societ...