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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 田畑 収 他
- Series Title
- Author Heading
- Periodical title
- 真空 = Journal of the Vacuum Society of Japan
- No. or year of volume/issue
- 28(5) 1985.05
- Volume
- 28
- Issue
- 5
- Pages
- p379~381