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New novel cleaning technique for extending mean time between mechanical cleans in a Genus tungsten CVD reactor SAND-94-1810C DE95 004546 CONF-94102691

New novel cleaning technique for extending mean time between mechanical cleans in a Genus tungsten CVD reactor SAND-94-1810C DE95 004546 CONF-94102691
Microform規格・テクニカルリポート類
Lujan, R. D, Fleming, J. G, Baird, J. L, Gentry, M. S1994<LS-DE95/004546>
National Diet Library

NEW NOVEL CLEANING TECHNIQUE FOR EXTENDING MEAN TIME BETWEEN MECHANICAL CLEANS IN A GENUS TUNGSTEN CVD REACTOR (SAND ; SAND-94-1810C)

NEW NOVEL CLEANING TECHNIQUE FOR EXTENDING MEAN TIME BETWEEN MECHANICAL CLEANS IN A GENUS TUNGSTEN CVD REACTOR (SAND ; SAND-94-1810C)
Paper図書
LUJAN, R.D.// FLEMING, J.G.// BAIRD, J.L.// GENTRY, M.S. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingLUJAN, R.D. FLEMING, J.G. BAIRD, J.L. GENTRY, M.S.

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