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Rigorous method for compensation selection and alignment of microlithographic optical systems UCRLJC130304 DE98 054775

Rigorous method for compensation selection and alignment of microlithographic optical systems UCRLJC130304 DE98 054775
Microform規格・テクニカルリポート類
Chapman, H. N, Sweeney, D. W1998<LS-DE98/054775>
National Diet Library

Measuring the effect of scatter on the performance of a lithography system UCRL-JC-123064 DE96 012225 CONF-96049312

Measuring the effect of scatter on the performance of a lithography system UCRL-JC-123064 DE96 012225 CONF-96049312
Microform規格・テクニカルリポート類
La Fontaine, B, Daly, T. P, Chapman, H. N, Gaines, D. P, Stearns, D. G1996<LS-DE96/012225>
National Diet Library

FEMTOSECOND DIFFRACTIVE IMAGING WITH A SOFT-X-RAY FREE-ELECTRON LASER. (S&T Issue 2016-05)(CD-ROM) (DE15992877 ; DE15992877; SLAC- PUB-14272; UCRL-JRNL-219848)

FEMTOSECOND DIFFRACTIVE IMAGING WITH A SOFT-X-RAY FREE-ELECTRON LASER. (S&T Issue 2016-05)(CD-ROM) (DE15992877 ; DE15992877; SLAC- PUB-14272; UCRL-JRNL-219848)
Paper図書
CHAPMAN, H.N.(et al.)2006.
Other Libraries in Japan
  • Author HeadingCHAPMAN, H.N.

MEASURING THE EFFECT OF SCATTER ON THE PERFORMANCE OF A LITHOGRAPHY SYSTEM (UCRL ; UCRL-JC-123064)

MEASURING THE EFFECT OF SCATTER ON THE PERFORMANCE OF A LITHOGRAPHY SYSTEM (UCRL ; UCRL-JC-123064)
Paper図書
LA FONTAINE, B.// DALY, T.P.// CHAPMAN, H.N.// GAINES, D.P.// STEARNS, D.G.// SWEENEY, D.W.// KANIA, D.R. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1996.
Other Libraries in Japan
  • Author HeadingLA FONTAINE, B. DALY, T.P. CHAPMAN, H.N. GAINES, D.P. STEARNS, D.G. SW...

X ray focusing using microchannel plates. Part 2 : experiments (UM ; UM-P-91/31)

X ray focusing using microchannel plates. Part 2 : experiments (UM ; UM-P-91/31)
Paper図書
Chapman, H.N., Rode, A., Nugent, K.A. [et al.]Melbourne Univ., School of Physics1991.
Other Libraries in Japan
  • Author HeadingChapman, H.N. Rode, A. Nugent, K.A. Wilkins...

X-ray focusing using capillary arrays (UM ; UM-P-90/33)

X-ray focusing using capillary arrays (UM ; UM-P-90/33)
Paper図書
Nugent, K.A., Chapman, H.N., Wilkins, S.W. [et al.]Melbourne Univ., School of Physics1990.
Other Libraries in Japan
  • Author HeadingNugent, K.A. Chapman, H.N. Wilkins, S.W. Stevenson, A.W....

Focusing and collimation of X-rays using microchannel plates: an experimental investigation (UM ; UM-P-90/25)

Focusing and collimation of X-rays using microchannel plates: an experimental investigation (UM ; UM-P-90/25)
Paper図書
Chapman, H.N., Nugent, K.A., Wilkins, S.W. [et al.]Melbourne Univ., School of Physics1990.
Other Libraries in Japan
  • Author HeadingChapman, H.N. Nugent, K.A. Wilkins, S.W. Da...

X-ray focusing using microchannel plates. Part 1: theory (UM ; UM-P-91/30)

X-ray focusing using microchannel plates. Part 1: theory (UM ; UM-P-91/30)
Paper図書
Chapman, H.N., Nugent, K.A., Wilkins, S.W.Melbourne Univ., School of Physics.1991.
Other Libraries in Japan
  • Author HeadingChapman, H.N. Nugent, K.A. Wilkins, S.W.

X-ray focusing using square channel-capillary arrays (UM ; UM-P-90/96)

X-ray focusing using square channel-capillary arrays (UM ; UM-P-90/96)
Paper図書
Chapman, H.N., Nugent, K.A., Wilkins, S.W.Melbourne Univ., School of Physics1990.
Other Libraries in Japan
  • Author HeadingChapman, H.N. Nugent, K.A. Wilkins, S.W.

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