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Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions

Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions
Paper図書
edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. WestwoodNoyes Publicationsc1990
Other Libraries in Japan
  • Author HeadingRossnagel, Stephen M. Cuomo, J. J. Westwood, William D. (William...

Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis

Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis
Paper図書
edited by Jerome J. Cuomo and Stephen M. Rossnagel, Harold R. KaufmanNoyes Publicationsc1989
Other Libraries in Japan
  • Author HeadingCuomo, J. J. Rossnagel, Stephen M. Kaufman...

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