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Characterization of polysilicon films by Raman spectroscopy and transmission electron microscopy: A comparative study SAND-93-2642C DE95 006858

Microform規格・テクニカルリポート類

Tallant, D. R, Headley, T. J, Medernach, J. W, Geyling, F1993<LS-DE95/006858>

National Diet Library

CHARACTERIZATION OF POLYSILICON FILMS BY RAMAN SPECTROSCOPY AND TRANSMISSION ELECTRON MICROSCOPY: A COMPARATIVE STUDY (SAND ; SAND-93-2642C)

Paper図書

TALLANT, D.R.// HEADLEY, T.J.// MEDERNACH, J.W.// GEYLING, F. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1993.

Other Libraries in Japan

Author HeadingTALLANT, D.R. HEADLEY, T.J. MEDERNACH, J.W. GEYLING, F.

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