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MEMS materials and processes handbook (MEMS reference shelf)

MEMS materials and processes handbook (MEMS reference shelf)
Paper図書
Reza Ghodssi, Pinyen Lin, editors.Springerc2011.<ND416-B42>
National Diet LibraryOther Libraries in Japan
  • Author HeadingGhodssi, Reza. Lin, Pinyen.

MEMS/MOEMS components and their applications 4 : 22-23 January 2007 : San Jose, California, USA. : Jan 2007, San Jose, CA. (SPIE Proceedings ; 6464)

MEMS/MOEMS components and their applications 4 : 22-23 January 2007 : San Jose, California, USA. : Jan 2007, San Jose, CA. (SPIE Proceedings ; 6464)
Paper図書
SPIEc2007.<M17-07-1039>
National Diet Library
  • Author HeadingGhodssi, Reza. Tadigadapa, Srinivas A. Henn...

MEMS/MOEMS components and their applications IV : 22-23 January 2007, San Jose, California, USA pbk.

MEMS/MOEMS components and their applications IV : 22-23 January 2007, San Jose, California, USA pbk.
Paper図書
SSrinivas A. Tadigadapa, Reza Ghodssi, Albert K. Henning, chairs/editors ; sponsored and published by SPIE--the International Society for Optical EngineeringSPIEc2007
Other Libraries in Japan
  • Author HeadingTadigadapa, Srinivas A. Ghodssi, Reza Henning, Albert K.

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