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Concurrent design of an RTP chamber and advanced control system SAND958580C DE98 006446 CONF950412

Concurrent design of an RTP chamber and advanced control system SAND958580C DE98 006446 CONF950412
Microform規格・テクニカルリポート類
Spence, P, Schaper, C, Kermani, A1995<LS-DE98/006446>
National Diet Library

Application of computational simulation to design optimization of an axisymmetric rapid thermal processing system SAND-94-8705C DE94 016778 CONF-94081222

Application of computational simulation to design optimization of an axisymmetric rapid thermal processing system SAND-94-8705C DE94 016778 CONF-94081222
Microform規格・テクニカルリポート類
Spence, P. A, Winters, W. S, Kee, R. J, Kermani, A1994<LS-DE94/016778>
National Diet Library

APPLICATION OF COMPUTATIONAL SIMULATION TO DESIGN OPTIMIZATION OF AN AXISYMMETRIC RAPID THERMAL PROCESSING SYSTEM (SAND ; SAND-94-8705C)

APPLICATION OF COMPUTATIONAL SIMULATION TO DESIGN OPTIMIZATION OF AN AXISYMMETRIC RAPID THERMAL PROCESSING SYSTEM (SAND ; SAND-94-8705C)
Paper図書
SPENCE, P.A.// WINTERS, W.S.// KEE, R.J.// KERMANI, A. (SANDIA NATIONAL LABS., LIVERMORE, CA (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingSPENCE, P.A. WINTERS, W.S. KEE, R.J. KERMANI, A.

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