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LATERALLY DRIVEN POLYSILICON RESONANT MICROSTRUCTURES (UCRL ; UCRL-21252)

LATERALLY DRIVEN POLYSILICON RESONANT MICROSTRUCTURES (UCRL ; UCRL-21252)
Paper図書
LANG, W.C.// HGUYEN, TU-CUONG H.//HOWE, R.T. (LAWRENCE LIVERMORE NATIONAL LAB., CA (USA))University of California Research Laboratory(University of California Research Laboratory)1988.
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  • Author HeadingLANG, W.C. HGUYEN, TU-CUONG H. HOWE, R.T...

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