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New novel cleaning technique for extending mean time between mechanical cleans in a Genus tungsten CVD reactor SAND-94-1810C DE95 004546 CONF-94102691

New novel cleaning technique for extending mean time between mechanical cleans in a Genus tungsten CVD reactor SAND-94-1810C DE95 004546 CONF-94102691
Microform規格・テクニカルリポート類
Lujan, R. D, Fleming, J. G, Baird, J. L, Gentry, M. S1994<LS-DE95/004546>
National Diet Library

NEW NOVEL CLEANING TECHNIQUE FOR EXTENDING MEAN TIME BETWEEN MECHANICAL CLEANS IN A GENUS TUNGSTEN CVD REACTOR (SAND ; SAND-94-1810C)

NEW NOVEL CLEANING TECHNIQUE FOR EXTENDING MEAN TIME BETWEEN MECHANICAL CLEANS IN A GENUS TUNGSTEN CVD REACTOR (SAND ; SAND-94-1810C)
Paper図書
LUJAN, R.D.// FLEMING, J.G.// BAIRD, J.L.// GENTRY, M.S. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingLUJAN, R.D. FLEMING, J.G. BAIRD, J.L. GEN...

Real-time SAW measurements of NVR in cleanroom and in microenvironment (SAND ; SAND-94-0478C; CONF-940510-6; DE94011937)

Real-time SAW measurements of NVR in cleanroom and in microenvironment (SAND ; SAND-94-0478C; CONF-940510-6; DE94011937)
Paper図書
Liang, A.Y. [et al.]Sandia National Labs.1994.5.
Other Libraries in Japan
  • Author HeadingLiang, A.Y. McIntyre, D.C. Lujan, R.D. Thornberg, S.M. Bender, S.F.A...

DEVELOPMENT OF HIGH SENSITIVITY TECHNIQUES FOR CHARACTERIZING OUTGASSING OF POLYMERIC CONSTRUCTION MATERIALS FOR MICROENVIRONMENTS (SAND ; SAND-94-1278C)

DEVELOPMENT OF HIGH SENSITIVITY TECHNIQUES FOR CHARACTERIZING OUTGASSING OF POLYMERIC CONSTRUCTION MATERIALS FOR MICROENVIRONMENTS (SAND ; SAND-94-1278C)
Paper図書
MCINTYRE, D.C.// THORNBERG, S.M.// LIANG, A.Y.// BENDER, S.F.A.// LUJAN, R.D. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingMCINTYRE, D.C. THORNBERG, S.M. LIANG, A.Y. BENDER, S.F.A. LUJAN, R.D.

TECHNIQUES FOR THE EVALUATION OF OUTGASSING FROM POLYMERIC WAFER PODS (SAND ; SAND-94-0635C)

TECHNIQUES FOR THE EVALUATION OF OUTGASSING FROM POLYMERIC WAFER PODS (SAND ; SAND-94-0635C)
Paper図書
MCINTYRE, D.C.// LIANG, A.// THORNBERG, S.M.// BENDER, S.F.// LUJAN, R.D.// BLEWER, R.S.// BOWERS, W.D. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1994.
Other Libraries in Japan
  • Author HeadingMCINTYRE, D.C. LIANG, A. THORNBERG, S.M. BENDER, S.F. LUJAN, R.D. BLEWER, R.S. BOWERS, W.D.

CHEMICAL VAPOR DEPOSITION AND CHARACTERIZATION OF TUNGSTEN BORON ALLOY FILMS (SAND ; SAND-93-2445C)

CHEMICAL VAPOR DEPOSITION AND CHARACTERIZATION OF TUNGSTEN BORON ALLOY FILMS (SAND ; SAND-93-2445C)
Paper図書
SMITH, P.M.// FLEMING, J.G.// LUJAN, R.D.// ROHERTY-OSMUN, E.// REID, J.S.// HOCHBERG, A.K.// ROBERTS, D.A. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))Sandia National Laboratories(Sandia National Laboratories)1993.
Other Libraries in Japan
  • Author HeadingSMITH, P.M. FLEMING, J.G. LUJAN, R.D. ROHERTY-OSMUN, E. REID, J.S. ...

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