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REFLECTION MASKS FOR SOFT X-RAY PROJECTION LITHOGRAPHY (UCRL ; UCRL-JC-108669)

REFLECTION MASKS FOR SOFT X-RAY PROJECTION LITHOGRAPHY (UCRL ; UCRL-JC-108669)
Paper図書
HAWRYLUK, A.M.// CEGLIO, N.M.// PHILLION, D.W.// GAINES, D.P.// BROWNING, R.// PEASE, R.F.// STEWART, D.// ECONOMOU, N. (LAWRENCE LIVERMORE NATIONAL LAB., CA (UNITED STATES))University of California Research Laboratory(University of California Research Laboratory)1991.
Other Libraries in Japan
  • Author Heading.... BROWNING, R. PEASE, R.F. STEWART, D. ECONOMOU, N.

Record of the IEEE annual symposium on electron, ion, and laser beam technology, 9th.

Record of the IEEE annual symposium on electron, ion, and laser beam technology, 9th.
Paper図書
Pease, R.F.W.(ed.)San Francisco Press1967.
Other Libraries in Japan
  • Author HeadingPease, R.F.W.

Record of the IEEE 9th annual symposium on Electron, Ion and Laser Beam Technology, Berkeley, 9-11 May 1967

Record of the IEEE 9th annual symposium on Electron, Ion and Laser Beam Technology, Berkeley, 9-11 May 1967
Paper図書
R.F.W. Pease editor ; sponsored by Group on Electron Devices of the Institute of Electrical and Electronics Engineers, Inc. and the College of Engineering, University of CaliforniaSan Francisco Pressc1967
Other Libraries in Japan
  • Author HeadingSymposium on Electron, Ion, and Laser Beam Technology Pease, R.F.W.

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