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Experimental and theoretical investigation of CF4 decomposition using low pressure RF plasma
Experimental and theoretical investigation of CF4 decomposition using low pressure RF plasma
Paper
博士論文
Tomoyuki Kuroki
[著]
[
Tomoyuki Kuroki
]
2005
<UT51-2006-A312>
National Diet Library
日本接着学会誌 : adhesion
日本接着学会誌 : adhesion
Paper
Digital
雑誌
日本接着学会
1990-
<Z17-134>
National Diet Library
Other Libraries in Japan
Journal of photopolymer science and technology
Journal of photopolymer science and technology
Paper
雑誌
The Society of Photopolymer Science and Technology
1993-
<Z53-W515>
National Diet Library
JSME international journal Ser. B Fluids and thermal engineering
JSME international journal Ser. B Fluids and thermal engineering
Paper
雑誌
Japan Society of Mechanical Engineers
1993-2006
<Z53-Y271>
National Diet Library
Other Libraries in Japan
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