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表面反応確率計測にもとづく超硬質窒化炭素膜コーティング技術の確立
表面反応確率計測にもとづく超硬質窒化炭素膜コーティング技術の確立
Paper
図書
伊藤治彦, 長岡技術科学大学 [著]
[伊藤治彦]
2001-2004
<Y151-H13555197>
National Diet Library
Subject Heading
アモルファスCN膜 / プラズマCVD / CNラジカル / BrCN / Ar準安定原子 / Arイオン / レーザー誘起蛍光 / 静電プローブ診断
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