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圧電性五酸化タンタル/
パイレツクスガラス
構造超音波デバイスの試作
圧電性五酸化タンタル/パイレツクスガラス構造超音波デバイスの試作
Paper
図書
山口, 正恆, 千葉大学
1993-1994
<Y151-H05650324>
National Diet Library
Subject Heading
五酸化タンタル 超音波トランスジユーサ 酸化亜鉛 圧電性 共振子 スパツタ
パイレツクスガラス
マイクロマシニング
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