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超精密マイクロ溝加工技術を利用した微小部品の直接接合
超精密マイクロ溝加工技術を利用した微小部品の直接接合
Paper
図書
竹内, 芳美, 電気通信大学
1999-2000
<Y151-H11555042>
National Diet Library
Subject Heading
マイクロV溝 超精密マシニングセンタ
マイクロダイヤモンド工具
接合 組立て技術
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