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半導体表面での吸着子超高速ダイナミツクスの直接観察
半導体表面での吸着子超高速ダイナミツクスの直接観察
Paper
図書
渡鍋, 文哉, 九州大学
1997-1998
<Y151-H09650032>
National Diet Library
Subject Heading
電界放射 アトミツクダイナミツクス 表面拡散 シリコン超薄膜
マイクロマシーン
その場微小機械要素創製・機械的特性評価装置の開発
その場微小機械要素創製・機械的特性評価装置の開発
Paper
図書
駒井, 謙治郎, 京都大学
1999-2000
<Y151-H11355007>
National Diet Library
Subject Heading
マイクロマテリアル
マイクロマシーン
機械的特性評価 破壊 疲労 微細放電加工 非接触ひずみ測定...
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