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不定比化合物シリコン・チタン窒化物の高機能化に関する研究
不定比化合物シリコン・チタン窒化物の高機能化に関する研究
Paper
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粕壁善隆, 東北大学 [著]
[粕壁善隆]
2005-2006
<Y151-H17560590>
National Diet Library
Subject Heading
不定比化合物 / 窒化物 / 機能性材料 / イオン注入 / その場観察 / 透過電子顕微鏡 / 電子エネルギー損失分光 / 分子軌道計算
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