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中性子転換注入法
でリンをドープしたポリシラン量子材料の半導体物性
中性子転換注入法でリンをドープしたポリシラン量子材料の半導体物性
Paper
図書
松山, 奉史, 京都大学
1994-1995
<Y151-H06640441>
National Diet Library
Subject Heading
ポリシラン量子材料 リンドープポリシラン n型ポリシラン半導体 低次元不純物半導体
中性子転換注入法
不純物分析 数平均分子量 中性子放射化分析
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