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座標計測の高度化に関する研究
座標計測の高度化に関する研究
Paper
図書
下河辺, 明, 東京工業大学
1995-1996
<Y151-H07305007>
National Diet Library
Subject Heading
ソフトウエアデータム ナノメートル計測 座標計測 光プローブ 超小型精密自走機械
仮想三次元測定機
結晶格子 能動制振
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