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ピコメートル位置決め装置の開発とその超精密加工への応用に関する研究
ピコメートル位置決め装置の開発とその超精密加工への応用に関する研究
Paper
図書
水本洋, 鳥取大学 [著]
[水本洋]
2003-2005
<Y151-H15360071>
National Diet Library
Subject Heading
位置決め / 工作機械 / ナノテクノロジ / 静圧軸受 / 超精密加工 / 摩擦駆動 / 能動制御
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