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カ-ボンナノチユ-ブを用いた高性能微小電子線源の作製
カ-ボンナノチユ-ブを用いた高性能微小電子線源の作製
Paper
図書
川田, 博昭, 大阪府立大学
2001-2002
<Y151-H13650382>
National Diet Library
Subject Heading
ゲ-ト付き微小電子線源 カ-ボンナノチユ-ブ
低電圧動作
反応性イオンエツチング 垂直配向 選択成長 電界放出特性
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