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SLDを利用した小径円筒の半径方向,軸方向及び角方向振れの同時検測システム
SLDを利用した小径円筒の半径方向,軸方向及び角方向振れの同時検測システム
Paper
図書
山田隆一, 長岡工業高等専門学校 [著]
[山田隆一]
2003-2004
<Y151-H15560109>
National Diet Library
Subject Heading
光応用計測 / SLD (Super Luminescent Diode) / 透過光方式 / スピンドル / 半径方向振れ / 軸方向振れ / 角方向振れ
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