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三次元積層集積回路を目指した超並列光接続システムの試作
三次元積層集積回路を目指した超並列光接続システムの試作
Paper
図書
米津, 宏雄, 豊橋技術科学大学
1996-1998
<Y151-H07555014>
National Diet Library
Subject Heading
超並列光接続 三次元積層集積回路 歪短周期超格子 低転位密度化 Si基板上のGaAs選択成長 GaP層の選択成長
原子状水素照射
微小発光・受光素子
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