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原子蒸着法
及び高真空中CVD法によるダイヤモンド低温合成と評価
原子蒸着法及び高真空中CVD法によるダイヤモンド低温合成と評価
Paper
図書
犬塚, 直夫, 青山学院大学
1990-1991
<Y151-H02805005>
National Diet Library
Subject Heading
ダイヤモンド CVD法
原子蒸着法
炭素クラスター 低温合成
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