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ミストCVD法とその酸化亜鉛薄膜成長への応用に関する研究
ミストCVD法とその酸化亜鉛薄膜成長への応用に関する研究
Digital
博士論文
川原村, 敏幸
京都大学 (Kyoto University)
2008-03-24
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Subject Heading
ZnO CVD ミスト法 超音波噴霧 ファインチャネル 薄膜成長 成長メカニズム
噴霧技術
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