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深い準位の格子欠陥観測による半導体に対する各種放射線照射効果の解明
深い準位の格子欠陥観測による半導体に対する各種放射線照射効果の解明
Paper
図書
木村, 逸郎, 京都大学
1991-1992
<Y151-H03452301>
National Diet Library
Subject Heading
半導体 放射線損傷 中性子転換注入 格子欠陥
容量過渡分光法
ラザフオード後方散乱法 チヤンネリング法
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