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超LSI製造用ガスフローメーターステンレス細管内壁の超精密研磨
超LSI製造用ガスフローメーターステンレス細管内壁の超精密研磨
Digital
文書・図像類
黒部, 利次, Kurobe, Toshiji
金沢大学工学部
2001-03
平成12(2000)年度 科学研究費補助金 基盤研究(C) 研究成果報告書 = 2000 Fiscal Year Final Research Report
1998-2000
p.72p.-
Other Libraries in Japan
Subject Heading
極細管 スラリー 高速流動研磨 内壁面研磨 壁面粗さ
差圧測定
capillary slurry high flow ra...
Note (General)
...式が見いだされ,仕上げの程度を
差圧測定
によって評価できることが分かった. In the field...
Reached to the end of result.
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