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波長変化を用いたゾーンプレート干渉計による非球面測定システム
波長変化を用いたゾーンプレート干渉計による非球面測定システム
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図書
辻内, 順平, 東京工業大学
1986-1987
<Y151-S61420020>
National Diet Library
Subject Heading
ゾーンプレート干渉計 非球面の高精度計測 フリンジスキヤンニング法の誤差解析
数値的位相決定法
不等間隔サンプリング
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