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高速・高均一デジタルCVDを用いたULSI用高機能性薄膜の作製
高速・高均一デジタルCVDを用いたULSI用高機能性薄膜の作製
Paper
図書
堀池靖浩, 東洋大学
1995-1995
<Y151-H05555089>
National Diet Library
Subject Heading
デジタルCVD ULSI 高機能性薄膜 積層層間絶縁膜 コンフオーマルCVD 低誘電率膜
時間変調プラズマ
バイアススパツタ
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