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InAIGaN混晶の相分離現象の解明と格子整合系窒化物量子構造の実現の研究
InAIGaN混晶の相分離現象の解明と格子整合系窒化物量子構造の実現の研究
Paper
図書
若原, 昭浩, 豊橋技術科学大学
1999-2001
<Y151-H11650013>
National Diet Library
Subject Heading
窒化物混晶半導体 組成不均一 リモートプラズマ
有機金属気相エピタキシー
半導体デジタル全光デバイス・集積回路の研究開発
半導体デジタル全光デバイス・集積回路の研究開発
Paper
図書
中野義昭, 東京大学 [著]
[中野義昭]
2002-2004
<Y151-H14205055>
National Diet Library
Subject Heading
有機金属気相エピタキシー
/ MOVPE / 選択成長 / 能動/受動集積 / 多モ...
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