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単結晶圧電素子を用いた新しい小形・高性能
機構デバイス
の研究
単結晶圧電素子を用いた新しい小形・高性能機構デバイスの研究
Paper
図書
中村, 僖良, 東北大学
1996-1998
<Y151-H08305010>
National Diet Library
Subject Heading
機構デバイス
圧電アクチユエータ アーク放電 電極損傷 リレー 分極反転...
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