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硬質薄膜特性の先端評価システムの開発と利用に関する研究
硬質薄膜特性の先端評価システムの開発と利用に関する研究
Paper
図書
帯川, 利之, 東京工業大学
1994-1995
<Y151-H06555034>
National Diet Library
Subject Heading
硬質薄膜 硬度試験 微小硬度 弾塑性有限要素法 分子動力学 コーテイング層
結合層
圧子
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