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移動プラズマ形超高速スパツタ法を用いた高周波用超低損失アモルフアス
薄帯磁心
の開発
移動プラズマ形超高速スパツタ法を用いた高周波用超低損失アモルフアス薄帯磁心の開発
Paper
図書
八木, 正昭, 宮城工業高等専門学校
1989-1991
<Y151-H01850066>
National Diet Library
Subject Heading
Co基アモルフアススパツタ薄膜
薄帯磁心
超低損失 高透磁率
Reached to the end of result.
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