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高速・高精度位置決め用小型・高トルク超音波モータの試作
高速・高精度位置決め用小型・高トルク超音波モータの試作
Paper
図書
上羽, 貞行, 東京工業大学
1993-1994
<Y151-H05555023>
National Diet Library
Subject Heading
超音波モータ
複合振動子型
精密位置決め 高速位置決め 圧電素子 等価回路モデル 弾性...
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