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表面化学反応を用いた高均質高レーザー耐力誘電体多層膜作成法の開発
表面化学反応を用いた高均質高レーザー耐力誘電体多層膜作成法の開発
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山中, 龍彦, 大阪大学
1995-1997
<Y151-H07558286>
National Diet Library
Subject Heading
表面化学反応 光学薄膜 酸化アルミニウム
酸化チタニウム
反射防止膜 高膜厚制御性 レーザー損傷
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