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超クリ-ン・真空環境用高出力
静電浮上
リニアモ-タ
超クリ-ン・真空環境用高出力静電浮上リニアモ-タ
Paper
図書
樋口, 俊郎, 東京大学
2000-2002
<Y151-H12355011>
National Diet Library
Subject Heading
静電モ-タ リニアモ-タ 非接触浮上
静電浮上
真空 クリ-ンル-ム アクチユエ-タ シリコンウエハ
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