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4族半導体原子層積層ヘテロ人工結晶の創成
4族半導体原子層積層ヘテロ人工結晶の創成
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室田淳一, 東北大学 [著]
[室田淳一]
2003-2005
<Y151-H15206031>
National Diet Library
Subject Heading
IV族半導体 / ヘテロ構造 / 原子層積層 / 人工結晶 / CVD / エピタキシャル成長 / SiGeC / 立体加工
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