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The MEMS handbook / edited by Mohamed Gad-el-Hak. 2nd ed. (Mechanical engineering series)

The MEMS handbook / edited by Mohamed Gad-el-Hak. 2nd ed. (Mechanical engineering series)
Paper図書
CRC/Taylor & Francis2006.<NB21-B5>
National Diet Library
  • Subject HeadingMicroelectromechanical systems -- Handbooks, manuals, etc. Microeletrônica - manuais.

Micro mechanical systems : principles and technology (Handbook of sensors and actuators ; v. 6)

Micro mechanical systems : principles and technology (Handbook of sensors and actuators ; v. 6)
Paper図書
edited by T. Fukuda and W. Menz.Elsevier1998.<NB21-A25>
National Diet LibraryOther Libraries in Japan
  • Subject Headingマイクロマシン. マイクロエレクトロニクス. Microelectromechanical systems -- Handbooks, manuals, etc.

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