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高精度ナノパーティクルジェットデポジション装置開発並びに付着現象ダイナミクス解明
高精度ナノパーティクルジェットデポジション装置開発並びに付着現象ダイナミクス解明
Paper
図書
厨川常元, 東北大学 [著]
[厨川常元]
2006-2007
<Y151-H18360064>
National Diet Library
Subject Heading
PJD / ナノパーティクル / 厚膜 / 付着現象ダイナミクス / 大規模分子動力学法 / 精密分散 / 精密分級 / 精密噴射
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