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レ-ザプロ-ブ法に基づくGHz帯弾性表面波伝搬の可視化
レ-ザプロ-ブ法に基づくGHz帯弾性表面波伝搬の可視化
Paper
図書
橋本, 研也, 千葉大学
2001-2002
<Y151-H13650394>
National Diet Library
Subject Heading
弾性表面波 レ-ザプロ-ブ ヘテロダイン
SAWデバイス
可視化
UMS技術を用いた超高周波
SAWデバイス
用単結晶基板表面の評価技術の開発
UMS技術を用いた超高周波SAWデバイス用単結晶基板表面の評価技術の開発
Paper
図書
櫛引, 淳一, 東北大学
2000-2002
<Y151-H12450119>
National Diet Library
Subject Heading
超音波マイクロスペクトロスコピ- LFB超音波顕微鏡 V (z) 曲線解析法 表面加工層 漏洩弾性表面波 単結晶材料評価
SAWデバイス
用材料 走査形非線形誘電率顕微鏡
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