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窒化アルミインジウムガリウム砒素の五元混晶成長と光電子集積回路実現への基礎的検討
窒化アルミインジウムガリウム砒素の五元混晶成長と光電子集積回路実現への基礎的検討
Paper
図書
淀徳男, 大阪工業大学 [著]
[淀徳男]
2003-2004
<Y151-H15560284>
National Diet Library
Subject Heading
Si基板 / InN / ECRプラズマ / 六方晶 / バンドギャップ / 酸素不純物 / 窒化物混晶半導体
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