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岩田, 博之, 高木, 誠, 徳田, 豊, 井村, 徹愛知工業大学2000-06-30総合技術研究所研究報告=Bulletin of Research Institute for Industrial Technology.2p.33-38

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Alternative TitleHイオンチュウニュウ　サレタ　シリコン　ノ　ケッカン　ブンプ　カンサツ Observation of Defect Distribution in H Ion Implanted Silicon
Alternative TitleHイオンチュウニュウ　サレタ　シリコン　ノ　ケッカン　ブンプ　カンサツ Observation of Defect Distribution in H Ion Implanted Silicon

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